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Linear Reactor Framework

Define the Manufacturing Space:

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The Linear Reactor Framework (LRF) utilizes the space between two parallel surfaces to standardize manufacturing requirements. 

LRF Outline no wafer.JPG

Example Process Volume

Why This Shape?

This reactor uses a wide, shallow, parallel-plate flow path. The fluid dynamics in this geometry is well-characterized over all flow and pressure regimes.   Because the substrate can be integrated flush with the chamber wall, the boundary conditions remain consistent and the flow field does not need to be re-invented for each substrate holder. The result is a chamber that can be scaled across different flat substrates while preserving the same underlying flow physics. The architecture also supports integration of energy-input layers (thermal, optical, RF/microwave, electrochemical) to drive bond formation or removal with uniform coverage control over large areas.

Fluid Dynamics

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Uniform coverage isn’t achieved by geometry alone—it’s achieved by combining a predictable flow field with active distribution and control. The parallel-plate chamber makes the fluid mechanics predictable and analyzable. This can be used to program flow regimes and manage concentration gradient over a wide range of process conditions.

LRF Outline Flow_edited.jpg

Adaptable to Any Flat Substrate - The LRF allows the integration of any flat surface.

LRF Outline.JPG
LRF Outline square wafer.JPG

Adaptable to a wide range of energy inputs

Energy Inputs_edited.jpg

The Linear Framework Scaffolding 

Framework Layout.JPG

The LRF can be used to create manufacturing applications using standardized space, systems and hardware. 

Just a few examples of what is possible:

Wet Process Build Assembly.JPG
Wet Process Strip_Clean Expression.JPG
Wet Process VPW Expression.JPG
Wet Process Electroless Plating Expression.JPG
Wet Process Plating Build Assembly.JPG
Wet Process Plating Build Assembly Anolyte.JPG
Wet Process Plating Build Assembly Anolyte foil back.JPG
ALD Expression.JPG
ALD Expression2.JPG
Dry Film Assembly.JPG
Dry Film Expression.JPG
PVD Etch PECVD Assembly.JPG
PVD Expression.JPG
Large Feature Photo Assembly.JPG
Large Feature Photo Expression.JPG

The LRF provides a practical, scalable foundation for future innovation. Its modular, plug-and-play architecture helps manufacturers streamline process development, reuse proven building blocks across applications, and improve operational efficiency.

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